Good system and process control lies at the heart of achieving industry leading throughput and yields.

 Software Platforms

With 50 years experience in developing dedicated platforms along with our customers we learnt the requirements are simple.

• Flexible enough for process designers
• Easy to use for operations and maintenance
• Powerful enough for production and quality control

Today’s state of the art "Khan" offers full closed loop and data logging from system pump down to vent.

 Process control technology

From  "optical pyrometry with <3% temp uniformity across a BAK760 calotte at 300C, to our QSK610, 6 way quartz crystal monitoring system and our broadband optical monitor GSM1100  we offer a  range of deposition control options including integrated RGAs and Sputter Process Monitors. For  co-deposition, thick layer and other special processes we offer customized solutions. Contact us