Optics Toolbox
Rapid changes in production demand require "fast track" installation of complex thin film processes. Minimising development time keeps throughput high and reduces costs. Initial theoretical design is just the start in a new process for complex optical stacks. The performance of the coating sources must be optimised for the exact materials and layers being processed, and the coating process itself must be controlled so that individual layers are terminated at just the right time to hit target spectra in the film design.
Optics Toolbox integrates all these processes. A proprietary strategy generator takes input from standard software packages like FilmstarTM, OptilayerTM, or Essential MacleodTM to define end points for each layer and Evatec's " Khan" system and process controller then offers seamless execution on either the BAK evaporation or MSP sputter platforms. Starting from June 2011, the Optics Toolbox now enables customers to select from either quartz or optical monitoring for layer end point determination.