Ideal for LED and optoelectronics production, "Autoload" completely eliminates the manual handling of wafers required  traditionally for mass production evaporation systems saving time and reducing costs .  The system is available for 4, 6 and 8 inch wafers as standard.   With full  tracking of wafer position in the coating process the user has the highest levels of traceability and statistical process control.   

Autoload takes care of all necessary steps including wafer alignment, dome loading and transfer to the coating chamber and incorporates dummy or metrology wafers as required to complete a process batch.

Precise handling and environment control eliminates potential sources of wafer damage or contamination and the option for integration of a coating post treatment module for customised process requirements extends Autoload module capability even further.

Contact your local Evatec representative to discuss how Evatec Autoload  can enhance your production throughputs and yields.