BAK 901: Bigger and better!
Process bigger batch sizes without compromise on batch times, film quality and yields.
BAK901 in a nutshell
- Fast processing for bigger batch sizes
- Available in standard and extended throw
- Footprint of only 6m²
With batch sizes of 51 and 23 pieces for 4 and 6 inch substrates respectively in standard calotte processing, the 901 offers around 25% more capacity than the BAK761. A larger baseplate space means the system can be configured with combinations of ion, e gun and thermal sources with plenty of space to spare for easy operator access during replenishment or maintenance.