BAK 901: Bigger and better!

Process bigger batch sizes without compromise on batch times, film quality and yields.

BAK901 in a nutshell

  • Fast processing for bigger batch sizes
  • Available in standard and extended throw
  • Footprint of only 6m²

Platform overview

With batch sizes of 51 and 23 pieces for 4 and 6 inch substrates respectively in standard calotte processing, the 901 offers around 25% more capacity than the BAK761. A larger baseplate space means the system can be configured with combinations of ion, e gun and thermal sources with plenty of space to spare for easy operator access during replenishment or maintenance.