Power Devices
From conventional single sided evaporation with dome tooling to high capacity planetary jigs and flip systems for double sided coating, Evatec offers custom evaporation systems optimised for power device manufacture. The EBS 500 Electron Beam Evaporation system supported by special quartz monitoring solutions enables measurement and control of typical metal layers such as Al, Ni, Ti and Ag at high rates or thicknesses. Coating platforms from the mid size BAK761 to the high volume BAV1250 can be equipped with single or multiple sources according to the highest manufacturing efficiency for devices including "Insulated Gate Bipolar Transistors" ( IGBTs), "Metal Oxide Field Effect Transistors" (MOSFETs) and "Gate Turn Off Thyristors" ( GTOs)
Contact your local sales and service office to configure systems and processes optimised for you own needs.